KLA/ECI: Chemical Metrology Systems
KLA/ECI Technology is the leading provider of Chemical Monitoring Systems (CMS), used by many of the world’s top chip and solar cell manufacturers. The company works closely with the most advanced research centers to develop analytical procedures for the Electroplating, Electroless Deposition, and Wet Processing fields.
KLA/ECI continues to push the boundaries of performance and efficiency in order to conform to the Semiconductor and Photovotaic industry’s tightening specification, the demand for lower CoO, and reduction of environmental impact.
Quali-Line®: Copper Deposition Control
The industry leading online Copper deposition CMS line provides the most accurate and reliable bath control in the industry. Capable of analyzing all known chemistries for Dual Damascene Metallization, Electroless Deposition, Advanced Packaging/Bumping, and MEMS. New non-reagent techniques and express analysis lead to drastically reduced Cost of Ownership while eliminating plating voids and errors.
New model available for TSV!
QualiSurf®: Wet Processing/Solar Analyzer
QualiLab series are ideal for monitoring almost every plating process. For laboratory users and smaller production lines that do not require automated sampling and ultra-accuracy of the powerful QLC series, QualiLab bench top systems are the most pertinent alternative.
Unique Applications for DSP+, and Si Texturing (including by products) for Solar manufacturing
QualiLab®: Plating Bath Analyzer
The QualiLab series provides a lower degree of the automation and accuracy offered by the flagship Quali-Line. This modular and flexible system is available in several configurations, for semi-automatic analysis or individual sample results. This system is ideal for R&D and laboratory use, or for lower volume production lines.